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Simulation and Fabrication of Macro Porous Silicon for Highly Chemicapacitive Detection for Aqueous Solvent

Shailesh Mahendralal Gheewala, Chinthakunta Parmesh, Piyush N. Patel, Rasika Dhavse

Abstract


Porous structured silicon material is most suited for sensing applications. In this paper, the fabricated porous structure silicon chemicapacitive device for sensing different chemical aqueous solvents. The design of the Porous Structure Silicon simulating in the 2-Dimension Synopsys Sentaurus Technology Computer-Aided Design (TCAD) tool. In the silicon substrate, the porous structure was fabricated by laser etching using Pulse Fiber Laser. Field emission scanning electron microscopy shows the average pore diameter 55.22 µm and pore depth 98.90 µm. Two front sides silver contact electrodes on the porous structure silicon made by colloidal silver conductive paste. The fabricated chemicapacitive device tested for different chemical aqueous solvents. The sensing electrical parameter is measured by the LCR meter. The application of the porous structure silicon chemicapacitive demonstrates the different concentrations of the ethyl alcohol aqueous solvent, which is used in medial, food, beverages, and fuel application. The fabricated chemicapacitive device gives a stable performance for 35 days of standard ambient temperature and pressure. The limit of detection and sensitivity of the fabricated chemicapacitive device was 0.474 ppm and 0.26 nF/ppm, respectively. The chemicapacitive based porous structure silicon is suitable for economical sensing and monitoring chemical aqueous solvent used in agriculture, beverages, chemical, medical, and pharmaceutical industries.

 

Keywords: Chemicapacitive Sensing, Chemical, Field Emission Scanning Electron Microscopy (FE-SEM), Laser Etching (LE), Porous Structure (PS), Porous Structure Silicon (Pss), Pulsed Fiber Laser (Pfl), Sensitivity, Standard Ambient Temperature and Pressure (SATP).


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References


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