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Macro-Porous Silicon Simulation and Fabrication for Highly Chemicapacitive Aqueous Solvent Detection

Shailesh Kushwaha

Abstract


Silicon with porous structure is best for sensing applications. The constructed silicon chemicapacitive device with a porous structure for sensing various chemical aqueous solvents is described in this paper. The 2-Dimension Synopsys Sentaurus Technology Computer-Aided Design (TCAD) tool's Porous Structure Silicon simulating design. The porous structure on the silicon substrate was created through Pulse Fiber Laser laser etching. Field outflow examining electron microscopy shows the typical pore measurement 55.22 µm and pore profundity 98.90 µm. Silver contact electrodes on the two front sides of the porous silicon structure are made of colloidal silver conductive paste. Different chemical aqueous solvents were tested using the manufactured chemicapacitive device. The LCR meter measures the sensing electrical parameter. The utilization of the porous structure silicon chemicapacitive exemplifies the various concentrations of the aqueous ethyl alcohol solvent, which is utilized in the production of media, beverages, food, and fuel. For 35 days at standard ambient temperature and pressure, the manufactured chemicapacitive device maintains its performance. The manufactured chemicapacitive device had a limit of detection of 0.474 ppm and a sensitivity of 0.26 nF/ppm, respectively. Silicon's chemicapacitive-based porous structure is suitable for cost-effective sensing and monitoring of chemical aqueous solvents used in the agricultural, chemical, pharmaceutical, and beverage industries.


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References


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